JJAP Conf. Proc. 4, 011502 (2016) doi:10.7567/JJAPCP.4.011502
Evaluation of kinetic-inductance nonlinearity in a single-crystal NbTiN-based coplanar waveguide
- 1Graduate School of Integrated Science and Technology, Shizuoka University, Hamamatsu 432-8011, Japan
- 2Advanced Technology Center, National Astronomical Observatory of Japan, Mitaka, Tokyo 181-8588, Japan
- 3Graduate School of Science and Engineering, Yamagata University, Yonezawa, Yamagata 992-8510, Japan
- 4Advanced ICT Research Center, NICT, Kobe 651-2492, Japan
- 5College of Engineering, Ibaraki University, Hitachi, Ibaraki 316-8511, Japan
- Received September 25, 2015
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We have developed a kinetic inductance travelling-wave amplifier toward the THz-band operation. In this paper, we discuss the nonlinear kinetic inductance of single-crystal niobium titanium nitride (NbTiN) thin film in response to the application of current to the film. In our calculation, it is found that single-crystal NbTiN films have a large current variation in the kinetic inductance compared with that of polycrystalline NbTiN films. To evaluate the nonlinearity, we fabricated a superconducting coplanar waveguide with a 0.2-m line length and measured the transmittance. We observed a variation of the electrical length of the line caused by the modulation of the kinetic inductance as a function of the value of the current applied to the strip.
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