JJAP Conf. Proc. 5, 011105 (2017) doi:10.7567/JJAPCP.5.011105
Analysis of oxidation behavior in nanocrystal β-FeSi2/Si composites by rutherford backscattering spectrometry and computation of diffusion flux
- 1Department of Computer Science and Electronics, Kyushu Institute of Technology, Fukuoka 820-8502, Japan
- 2Takasaki Ion Accelerators for Advanced Radiation Application, National Institutes for Quantum and Radiological Science and Technology, (QST), Takasaki, Gunma 370-1292, Japan
- Received August 03, 2016
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We have investigated oxidation behaviors of nanocrystal (NC) β-FeSi2/Si composites by Rutherford Backscattering Spectrometry (RBS) and computation of diffusion fluxes. The oxidation is controlled by diffusion of the O flux from the surface and the Si flux toward the Matano–Boltzmann (M–B) interface. The time dependence of the location of the M–B interface was determined. We proposed a model for oxidation of the composite that is different from oxidation of Si controlled by O diffusion through SiO2 at the surface.
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