JJAP Conference Proceedings

JJAP Conf. Proc. 5, 011201 (2017) doi:10.7567/JJAPCP.5.011201

Realization of crystalline BaSi thin films by vacuum evaporation on (111)-oriented Si layers fabricated by aluminum induced crystallization

Jefferson A. Wibowo1, Isao Takahashi1, Kosuke O. Hara2, Noritaka Usami1

  1. 1Graduate School of Engineering, Nagoya University, Nagoya 464-8603, Japan
  2. 2Center for Crystal Science and Technology, University of Yamanashi, Kofu 400-8511, Japan
  • Received August 26, 2016
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We have realized single phase crystalline BaSi2 thin films on quartz substrate by vacuum evaporation for solar cell applications. This structure is achieved by introducing (111)-oriented poly-Si fabricated by aluminum induced crystallization as a supply layer prior to BaSi2 deposition. Raman measurements showed five characteristic peaks corresponding to [Si4]4− anions vibrations in BaSi2 for all films deposited at 400 °C and above. X-ray diffraction analysis showed that randomly-oriented orthorhombic phase of BaSi2 is achieved with no trace of secondary phases. Also, the crystal quality is enhanced at higher substrate temperatures.

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