JJAP Conference Proceedings

JJAP Conf. Proc. 5, 011204 (2017) doi:10.7567/JJAPCP.5.011204

Growth of p-type β-FeSi polycrystalline films by RF magnetron sputtering

Shuya Ikeda1, Kazuya Ogi1, Tetsu Hattori2, Takahiko Higashi2, Yoshikazu Terai1,2

  1. 1Department of Computer Science and Electronics, Kyushu Institute of Technology, Fukuoka 820-8502, Japan
  2. 2Graduate School of Science and Engineering, Kagoshima University, Kagoshima 890-0065, Japan
  • Received March 07, 2017
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Abstract

β-FeSi2 polycrystalline films with p-type conduction were grown by RF magnetron sputtering using a B-doped p+-Si target with Fe chips. The hole density and mobility were 2 × 1017 cm−3 and 71 cm2 V−1 s−1 at RT, respectively. The acceptor levels formed by the B-doping were obtained to be 10 and 245 meV. In the temperature dependence of electrical properties, the p-type β-FeSi2 film showed the impurity-band conduction at 77–350 K.

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