JJAP Conference Proceedings

JJAP Conf. Proc. 5, 011302 (2017) doi:10.7567/JJAPCP.5.011302

Solid-phase synthesis of MgSi thin film on sapphire substrate

Motomu Saijo, Kazuhiro Kunitake, Ryota Sasajima, Yuta Takagi, Naoyuki Sato, Takashi Ikehata

  1. Institute of Applied Beam Science, Ibaraki University, Hitachi, Ibaraki 316-8511, Japan
  • Received September 14, 2016
  • PDF (1.2 MB) |

Abstract

Magnesium silicide (Mg2Si) is expected as a semiconductor material for thermoelectric devices though synthesis of the thin film has been difficult due to difference in thermodynamic properties of Mg and Si. The authors have succeeded in preparing a poly-crystalline Mg2Si thin film with a thickness of ~1 µm and strong (111) orientation on a sapphire substrate (r plane). The method includes sputter deposition of a Mg/Si bilayer from independent Mg and Si sources and post-annealing (2 h) in argon gas at 900 Pa. The optimum annealing temperature for the Mg2Si film synthesis is found to be 300–400 °C.

Creative Commons License Content from this work may be used under the terms of the Creative Commons Attribution 4.0 license. Any further distribution of this work must maintain attribution to the author(s) and the title of the work, journal citation and DOI.

References

  1. 1 J. E. Mahan, A. Vantomme, and G. Langouche, Phys. Rev. B 54, 16965 (1996).
  2. 2 N. Galkin, S. Vavanova, A. Maslov, K. Galkin, A. Gerasimenko, and T. Kaidalova, Thin Solid Films 515, 8230 (2007).
  3. 3 Q. Xiao, Q. Xie, K. Zhao, and Z. Yu, Adv. Mater. Res. 129–131, 290 (2010).
  4. 4 Q. Xiao, Q. Xie, X. Shen, J. Zhang, Z. Yu, and K. Zhao, Appl. Surf. Sci. 257, 7800 (2011).
  5. 5 T. Kato, Y. Sago, and H. Fujiwara, J. Appl. Phys. 110, 063723 (2011).
  6. 6 L. Kogut and M. Record, Intermetallics 32, 184 (2013).
  7. 7 T. Ikehata, T. Ando, T. Yamamoto, Y. Takagi, N. Y. Sato, and H. Udono, Phys. Status Solidi C 10, 1708 (2013).
  8. 8 J. Hu, Y. Sato, T. Hosono, and H. Tatsuoka, Vacuum 83, 1494 (2009).
  9. 9 S. Onari and M. Cardona, Phys. Rev. B 14, 3520 (1976).