JJAP Conf. Proc. 5, 011302 (2017) doi:10.7567/JJAPCP.5.011302
Solid-phase synthesis of MgSi thin film on sapphire substrate
- Institute of Applied Beam Science, Ibaraki University, Hitachi, Ibaraki 316-8511, Japan
- Received September 14, 2016
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Magnesium silicide (Mg2Si) is expected as a semiconductor material for thermoelectric devices though synthesis of the thin film has been difficult due to difference in thermodynamic properties of Mg and Si. The authors have succeeded in preparing a poly-crystalline Mg2Si thin film with a thickness of ~1 µm and strong (111) orientation on a sapphire substrate (r plane). The method includes sputter deposition of a Mg/Si bilayer from independent Mg and Si sources and post-annealing (2 h) in argon gas at 900 Pa. The optimum annealing temperature for the Mg2Si film synthesis is found to be 300–400 °C.
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