JJAP Conference Proceedings

JJAP Conf. Proc. 8, 011002 (2020) doi:10.7567/JJAPCP.8.011002

Observation of Magnesium-Induced Crystallization (Mg-MIC) of a-Si Thin Film

Takashi Ikehata, Ryota Sasajima, Motomu Saijo, Naoyuki Sato, Haruhiko Udono

  1. Graduate School of Science and Engineering, Ibaraki University, Hitachi, Ibaraki 316-8511, Japan
  • Received September 30, 2019
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Magnesium induced crystallization (Mg-MIC), that is, the low temperature crystallization process of an amorphous silicon (a-Si) film activated by magnesium has first been investigated. The crystallization temperature is evaluated as low as 450 °C from Raman spectroscopy in contrast to 600–800 °C in the solid phase crystallization (SPC) process (only a-Si film is heated). The crystallization is found to occur via the formation of intermediate phase: the silicide (Mg2Si) as reported in the Ni-MIC studies. A filamentary structure expected from the previous studies is not observed.

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